JPH0228442Y2 - - Google Patents
Info
- Publication number
- JPH0228442Y2 JPH0228442Y2 JP14893482U JP14893482U JPH0228442Y2 JP H0228442 Y2 JPH0228442 Y2 JP H0228442Y2 JP 14893482 U JP14893482 U JP 14893482U JP 14893482 U JP14893482 U JP 14893482U JP H0228442 Y2 JPH0228442 Y2 JP H0228442Y2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- humidity
- sensitive
- circuit
- sensing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003990 capacitor Substances 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 8
- 230000010354 integration Effects 0.000 claims description 7
- 239000010409 thin film Substances 0.000 description 27
- 238000005259 measurement Methods 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 229910021417 amorphous silicon Inorganic materials 0.000 description 6
- 239000012212 insulator Substances 0.000 description 6
- 238000009529 body temperature measurement Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- JHJLBTNAGRQEKS-UHFFFAOYSA-M sodium bromide Chemical compound [Na+].[Br-] JHJLBTNAGRQEKS-UHFFFAOYSA-M 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 229910000314 transition metal oxide Inorganic materials 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14893482U JPS5953264U (ja) | 1982-09-30 | 1982-09-30 | 感温感湿素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14893482U JPS5953264U (ja) | 1982-09-30 | 1982-09-30 | 感温感湿素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5953264U JPS5953264U (ja) | 1984-04-07 |
| JPH0228442Y2 true JPH0228442Y2 (en]) | 1990-07-31 |
Family
ID=30330753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14893482U Granted JPS5953264U (ja) | 1982-09-30 | 1982-09-30 | 感温感湿素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5953264U (en]) |
-
1982
- 1982-09-30 JP JP14893482U patent/JPS5953264U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5953264U (ja) | 1984-04-07 |
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